Hardware
Hardware solutions
Three machines, all delivered with the software already running on them: an AMR platform that carries whatever you put on its deck, a wafer inspection system, and a die pickup tester.
AMR platform
The P250 drive base with navigation and fleet control on it. Three lengths, one deck interface, rated for load, overhang and deck torque together.
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WIS-300 inspection system
Ø300 mm wafer macro defect inspection, bright field and dark field in one head, a full wafer in 296 fields.
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DPT-150 die pickup tester
Can a singulated die be picked cleanly off expanded dicing tape? A bench instrument for Ø150 mm wafers, with the expander, the needle ejector and the vacuum collet all working to one fixed pick point.
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